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電気抵抗温度依存性の測定によるアルミニウム薄膜の音速評価 孫, 新 SUN, Xin 小竹, 茂夫 KOTAKE, Shigeo 鈴木, 泰之 SUZUKI, Yasuyuki 妹尾, 允史 SENOO, Masafumi 420 Relaxation Time Linear Response Theory Force-Force Correlation Function Pseudopotential Method application/pdf The evaluation of sound velocity, elastic constant of thin film has not been well established. The relation between electrical resistivity and sound velocity has been clarified from the calculation on the temperature dependence of electrical resistivity by well-known linear response theory. From the experimental data of electrical resistivity, we evaluated sound velocity and elastic constant of thin films by using the linear response theory, pseudopotential method. We also confirmed the method to evaluate the mechanical properties of thin film by measuring electrical resistivity. journal article 日本機械学会 1998-05-25 VoR application/pdf 日本機械学會論文集. A編 621 64 1410 1414 AN0018742X 0387-5008 https://mie-u.repo.nii.ac.jp/record/8280/files/40A6948.pdf http://hdl.handle.net/10076/8799 https://mie-u.repo.nii.ac.jp/records/8280 jpn http://ci.nii.ac.jp/naid/110002374588/ 社団法人日本機械学会 本文データは学協会の許諾に基づきCiNiiから複製したものである