{"created":"2023-06-19T11:37:35.052694+00:00","id":4947,"links":{},"metadata":{"_buckets":{"deposit":"f68b438e-2b44-4592-8d60-f1f0c8428de1"},"_deposit":{"created_by":13,"id":"4947","owners":[13],"pid":{"revision_id":0,"type":"depid","value":"4947"},"status":"published"},"_oai":{"id":"oai:mie-u.repo.nii.ac.jp:00004947","sets":["366:367:368:386"]},"author_link":["10535","10536"],"item_4_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1993-12-21","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"5","bibliographicPageStart":"1","bibliographicVolumeNumber":"18","bibliographic_titles":[{"bibliographic_title":"Research reports of the Faculty of Engineering, Mie University"}]}]},"item_4_description_14":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_4_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"This summary introduces new technology of mechanical engineering using ion beam technique. Ion-beam process is induced from plasma state. Engineering working may not proceed satisfied in equilibrium state but in non-equilibrium as the technology becomes precise and high level. Vacuum deposition, ion plating, sputtering and ion implantation are classified with their energy. Preliminary application of ion implantation to micromachine processing is reviewed. Aluminum plate was maked, irradiated by nitrogen ion (with 40keV, 10μA/cm² and 0.1C/cm²), etched with 0.1N NaOH. Trench structure of 15μm in depth and a high aspect ratio of 0.9 was achived.","subitem_description_type":"Abstract"}]},"item_4_publisher_30":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Faculty of Engineering, Mie University"}]},"item_4_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0385-6208","subitem_source_identifier_type":"PISSN"}]},"item_4_source_id_9":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA00816341","subitem_source_identifier_type":"NCID"}]},"item_4_text_18":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_text_language":"ja","subitem_text_value":"マイクロマシン加工における粒子線工学とその応用"}]},"item_4_text_65":{"attribute_name":"資源タイプ（三重大）","attribute_value_mlt":[{"subitem_text_value":"Departmental Bulletin Paper / 紀要論文"}]},"item_4_version_type_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Suzuki, Yasuyuki","creatorNameLang":"en"},{"creatorName":"鈴木, 泰之","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"10535","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Senoo, Masafumi","creatorNameLang":"en"},{"creatorName":"妹尾, 允史","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"10536","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-02-18"}],"displaytype":"detail","filename":"AA008163410180003.PDF","filesize":[{"value":"295.8 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"AA008163410180003.PDF","url":"https://mie-u.repo.nii.ac.jp/record/4947/files/AA008163410180003.PDF"},"version_id":"d57d983e-03d1-45a3-9e8b-e31d12c87554"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"ion beam","subitem_subject_scheme":"Other"},{"subitem_subject":"ion implantation","subitem_subject_scheme":"Other"},{"subitem_subject":"micro-machine","subitem_subject_scheme":"Other"},{"subitem_subject":"non-equilibrium","subitem_subject_scheme":"Other"},{"subitem_subject":"aluminum","subitem_subject_scheme":"Other"},{"subitem_subject":"nitrogen","subitem_subject_scheme":"Other"},{"subitem_subject":"trench structure","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Ion-Beam Engineering and Its Application to Micro Machine Processing","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Ion-Beam Engineering and Its Application to Micro Machine Processing","subitem_title_language":"en"}]},"item_type_id":"4","owner":"13","path":["386"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2007-07-02"},"publish_date":"2007-07-02","publish_status":"0","recid":"4947","relation_version_is_last":true,"title":["Ion-Beam Engineering and Its Application to Micro Machine Processing"],"weko_creator_id":"13","weko_shared_id":-1},"updated":"2023-10-05T06:14:29.139197+00:00"}