{"created":"2023-06-19T11:39:57.174450+00:00","id":8196,"links":{},"metadata":{"_buckets":{"deposit":"09c54af8-b556-45fd-b6c3-bad9352003b1"},"_deposit":{"created_by":15,"id":"8196","owners":[15],"pid":{"revision_id":0,"type":"depid","value":"8196"},"status":"published"},"_oai":{"id":"oai:mie-u.repo.nii.ac.jp:00008196","sets":["366:638:639"]},"author_link":["20528","20529","20530","20531","20532","20533"],"item_10001_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1999-08-25","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"636","bibliographicPageEnd":"1823","bibliographicPageStart":"1818","bibliographicVolumeNumber":"65","bibliographic_titles":[{"bibliographic_title":"日本機械学會論文集. A編"}]}]},"item_10001_description_19":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_10001_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The plastic deformation of TiN thin films was considered by the hardness anisotropy of these films with the (111) and (200) preferred orientation. These hardness were measured by the nano-indentation technique as have already been reported. The plastic deformation of TiN films were caused by indentation of the trigonal diamond tip, and the evidence of this phenomenon was given by the cross-sectional SEM observation and the TED analysis. The influence of difference of residual stress and grain size on the hardness anisotropy was restrictive, and the hardness anisotropy can be explained by the anisotropy of the yield stress calculated by Schmid's law. This relationship suggests the existence of {100} <110> slip system of TiN crystal. The TEM observation of brittle cracks of TiN films also makes it clear that these cracks caused not by the cleavage fracture but by the intergranular fracture.","subitem_description_type":"Abstract"}]},"item_10001_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"日本機械学会"}]},"item_10001_relation_42":{"attribute_name":"関係URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"http://ci.nii.ac.jp/naid/110002375095/"}]}]},"item_10001_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"社団法人日本機械学会"},{"subitem_rights":"本文データは学協会の許諾に基づきCiNiiから複製したものである"}]},"item_10001_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN0018742X","subitem_source_identifier_type":"NCID"}]},"item_10001_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0387-5008","subitem_source_identifier_type":"PISSN"}]},"item_10001_subject_21":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"570","subitem_subject_scheme":"NDC"}]},"item_10001_text_25":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_text_value":"Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-beam-assisted Deposition"}]},"item_10001_text_70":{"attribute_name":"資源タイプ（三重大）","attribute_value_mlt":[{"subitem_text_value":"Journal Article / 学術雑誌論文"}]},"item_10001_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"林, 敏行","creatorNameLang":"ja"},{"creatorName":"HAYASHI, Toshiyuki","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20528","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"松室, 昭仁","creatorNameLang":"ja"},{"creatorName":"MATSUMURO, Akihito","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20529","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"渡邊, 知彦","creatorNameLang":"ja"},{"creatorName":"WATANABE, Tomohiko","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20530","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"森, 敏彦","creatorNameLang":"ja"},{"creatorName":"MORI, Toshihiko","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20531","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"高橋, 裕","creatorNameLang":"ja"},{"creatorName":"TAKAHASHI, Yutaka","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20532","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山口, 勝美","creatorNameLang":"ja"},{"creatorName":"YAMAGUCHI, Katsumi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20533","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-02-18"}],"displaytype":"detail","filename":"40A6634.pdf","filesize":[{"value":"893.5 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"40A6634.pdf","url":"https://mie-u.repo.nii.ac.jp/record/8196/files/40A6634.pdf"},"version_id":"cf4bd59b-6306-4de5-8119-fab371371f2a"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Plasticity","subitem_subject_scheme":"Other"},{"subitem_subject":"Anisotropy","subitem_subject_scheme":"Other"},{"subitem_subject":"Hardness","subitem_subject_scheme":"Other"},{"subitem_subject":"Titanium Nitride","subitem_subject_scheme":"Other"},{"subitem_subject":"Slip System","subitem_subject_scheme":"Other"},{"subitem_subject":"Preferred Orientation","subitem_subject_scheme":"Other"},{"subitem_subject":"Ion-Beam-Assisted Deposition","subitem_subject_scheme":"Other"},{"subitem_subject":"Thin Film","subitem_subject_scheme":"Other"},{"subitem_subject":"Coating","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"イオンビーム支援蒸着法により形成されたTiN配向薄膜の変形特性に関する考察","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"イオンビーム支援蒸着法により形成されたTiN配向薄膜の変形特性に関する考察","subitem_title_language":"ja"}]},"item_type_id":"10001","owner":"15","path":["639"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2008-03-05"},"publish_date":"2008-03-05","publish_status":"0","recid":"8196","relation_version_is_last":true,"title":["イオンビーム支援蒸着法により形成されたTiN配向薄膜の変形特性に関する考察"],"weko_creator_id":"15","weko_shared_id":-1},"updated":"2023-10-13T01:33:14.686635+00:00"}