{"created":"2023-06-19T11:39:57.259831+00:00","id":8198,"links":{},"metadata":{"_buckets":{"deposit":"76957fff-96b1-4afc-a2b1-891f5e94b293"},"_deposit":{"created_by":15,"id":"8198","owners":[15],"pid":{"revision_id":0,"type":"depid","value":"8198"},"status":"published"},"_oai":{"id":"oai:mie-u.repo.nii.ac.jp:00008198","sets":["366:638:639"]},"author_link":["20550","20551","20552","20553","20554","20555"],"item_10001_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2001-01-15","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"99","bibliographicPageStart":"94","bibliographicVolumeNumber":"44","bibliographic_titles":[{"bibliographic_title":"JSME international journal. Series A, Solid mechanics and material engineering"}]}]},"item_10001_description_19":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_10001_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Plastic deformation of TiN thin films with (111) and (200) preferred orientation was determined based on their hardness anisotropy. Hardness was measured by means of the nano-indentation technique. Plastic deformation of TiN films was caused by the indentation of the trigonal diamond tip, and evidence of this phenomenon was provided by cross-sectional scanning electron microscopy (SEM) observation and transmission electron diffraction (TED) analysis. The influence of the differences in residual stress and grain size on hardness anisotropy was restrictive, and hardness anisotropy can be explained by the anisotropy of yield stress as calculated using Schmid's law. This relationship suggests the existence of a {100}<110> slip system in the TiN crystal. Transmission electron microscopy (TEM) observation of brittle cracks in TiN films confirmed that these cracks are caused not by cleavage fractures but by intergranular fractures.","subitem_description_type":"Abstract"}]},"item_10001_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Japan Society of Mechanical Engineers"}]},"item_10001_relation_42":{"attribute_name":"関係URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"http://ci.nii.ac.jp/naid/110002974684/"}]}]},"item_10001_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"社団法人日本機械学会"},{"subitem_rights":"本文データは学協会の許諾に基づきCiNiiから複製したものである"}]},"item_10001_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11179396","subitem_source_identifier_type":"NCID"}]},"item_10001_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1344-7912","subitem_source_identifier_type":"PISSN"}]},"item_10001_subject_21":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"570","subitem_subject_scheme":"NDC"}]},"item_10001_text_70":{"attribute_name":"資源タイプ（三重大）","attribute_value_mlt":[{"subitem_text_value":"Journal Article / 学術雑誌論文"}]},"item_10001_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"HAYASHI, Toshiyuki","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"MATSUMURO, Akihito","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"WATANABE, Tomohiko","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"MORI, Toshihiko","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"TAKAHASHI, Yutaka","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"YAMAGUCHI, Katsumi","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-02-18"}],"displaytype":"detail","filename":"40A6636.pdf","filesize":[{"value":"701.8 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"40A6636.pdf","url":"https://mie-u.repo.nii.ac.jp/record/8198/files/40A6636.pdf"},"version_id":"0e93c521-74c3-40f7-abd6-1f8004e3eb78"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Plasticity","subitem_subject_scheme":"Other"},{"subitem_subject":"Anisotropy","subitem_subject_scheme":"Other"},{"subitem_subject":"Hardness","subitem_subject_scheme":"Other"},{"subitem_subject":"Titanium Nitride","subitem_subject_scheme":"Other"},{"subitem_subject":"Slip System","subitem_subject_scheme":"Other"},{"subitem_subject":"Preferred Orientation","subitem_subject_scheme":"Other"},{"subitem_subject":"Ion-Beam-Assisted Deposition","subitem_subject_scheme":"Other"},{"subitem_subject":"Thin Film","subitem_subject_scheme":"Other"},{"subitem_subject":"Coating","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition","subitem_title_language":"en"}]},"item_type_id":"10001","owner":"15","path":["639"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2008-03-05"},"publish_date":"2008-03-05","publish_status":"0","recid":"8198","relation_version_is_last":true,"title":["Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition"],"weko_creator_id":"15","weko_shared_id":-1},"updated":"2023-10-13T02:10:25.155045+00:00"}