{"created":"2023-06-19T11:39:57.344329+00:00","id":8200,"links":{},"metadata":{"_buckets":{"deposit":"0147183a-e257-456a-b6ef-0453fa15097b"},"_deposit":{"created_by":15,"id":"8200","owners":[15],"pid":{"revision_id":0,"type":"depid","value":"8200"},"status":"published"},"_oai":{"id":"oai:mie-u.repo.nii.ac.jp:00008200","sets":["366:638:639"]},"author_link":["20562","20563","20564","20565","20566"],"item_10001_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2000-09-15","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"3","bibliographicPageEnd":"185","bibliographicPageStart":"180","bibliographicVolumeNumber":"6","bibliographic_titles":[{"bibliographic_title":"Materials science research international"}]}]},"item_10001_description_19":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_10001_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"TiN films with the(111)and(200)preferred orientations were formed on Si(100)and sapphire(0001)substrates by ion-beam-assisted deposition. The difference in the mechanical properties between the(111)and(200)preferred orientation in TiN thin films was clarified by the nano-indentation technique with the trigonal diamond tip. The experiments revealed significant differences in hardness H and modulus E^* irrespective of the substrate materials. The measured values were H=16 GPa, E^*=316 GPa for the(200)preferred orientation and H=9 GPa, E^*=192 GPa for the(111)preferred orientation. The behavior of the plastic deformation in the TiN films was estimated by the cross-sectional SEM observation and the TEM analysis. These microstructural analyses showed significant difference in cross-sectional views of the plastic deformation and the intergranular fracture mechanism.","subitem_description_type":"Abstract"}]},"item_10001_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Society of Materials Science"}]},"item_10001_relation_42":{"attribute_name":"関係URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"http://ci.nii.ac.jp/naid/110002283873/"}]}]},"item_10001_rights_15":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"社団法人日本材料学会"},{"subitem_rights":"本文データは学協会の許諾に基づきCiNiiから複製したものである"}]},"item_10001_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11046472","subitem_source_identifier_type":"NCID"}]},"item_10001_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1341-1683","subitem_source_identifier_type":"PISSN"}]},"item_10001_subject_21":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"570","subitem_subject_scheme":"NDC"}]},"item_10001_text_70":{"attribute_name":"資源タイプ（三重大）","attribute_value_mlt":[{"subitem_text_value":"Journal Article / 学術雑誌論文"}]},"item_10001_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"MATSUMURO, Akihito","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20562","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"WATANABE, Tomohiko","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20563","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"HAYASHI, Toshiyuki","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20564","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"MORI, Toshihiko","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20565","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"TAKAHASHI, Yutaka","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"20566","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-02-18"}],"displaytype":"detail","filename":"40A6638.pdf","filesize":[{"value":"2.0 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"40A6638.pdf","url":"https://mie-u.repo.nii.ac.jp/record/8200/files/40A6638.pdf"},"version_id":"0437b135-990d-4284-825b-1de6f4a89c8b"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Mechanical properties","subitem_subject_scheme":"Other"},{"subitem_subject":"TiN film","subitem_subject_scheme":"Other"},{"subitem_subject":"Preferred orientation","subitem_subject_scheme":"Other"},{"subitem_subject":"Nano-indentation","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Mechanical Properties of TiN Films with the Preferred Orientations by Nano-Indentation Method","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Mechanical Properties of TiN Films with the Preferred Orientations by Nano-Indentation Method","subitem_title_language":"en"}]},"item_type_id":"10001","owner":"15","path":["639"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2008-03-05"},"publish_date":"2008-03-05","publish_status":"0","recid":"8200","relation_version_is_last":true,"title":["Mechanical Properties of TiN Films with the Preferred Orientations by Nano-Indentation Method"],"weko_creator_id":"15","weko_shared_id":-1},"updated":"2023-10-13T02:10:30.208915+00:00"}