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  1. 40 大学院工学研究科・工学部
  2. 40A 学術雑誌論文
  3. 学術雑誌論文

Fabrication and optical characterization of a 2D metal periodic grating structure for cold filter application

http://hdl.handle.net/10076/0002000101
http://hdl.handle.net/10076/0002000101
a72c49f1-ae45-40e0-a220-7247891dd5f7
名前 / ファイル ライセンス アクション
2023JA0009.pdf 2023JA0009.pdf (424 KB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2023-10-06
タイトル
タイトル Fabrication and optical characterization of a 2D metal periodic grating structure for cold filter application
言語 en
言語
言語 eng
キーワード
言語 en
主題Scheme Other
主題 cold filter
キーワード
言語 en
主題Scheme Other
主題 2D metal periodic grating
キーワード
言語 en
主題Scheme Other
主題 electron beam lithography
キーワード
言語 en
主題Scheme Other
主題 interference
キーワード
言語 en
主題Scheme Other
主題 surface plasmon resonance
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者 Motogaito, Atsushi

× Motogaito, Atsushi

en Motogaito, Atsushi

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Kito, Masanori

× Kito, Masanori

en Kito, Masanori

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Miyake, Hideto

× Miyake, Hideto

en Miyake, Hideto

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Hiramatsu, Kazumasa

× Hiramatsu, Kazumasa

en Hiramatsu, Kazumasa

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抄録
内容記述タイプ Abstract
内容記述 Cold filters, which simultaneously reflect infrared light and transmit visible light, prevent overheating in charge-coupled device cameras, microscopes, and other heat-sensitive equipment. This study proposes a cold filter based on a two-dimensional(2D) metal periodic grating structure. Conventional dielectric multilayer films with abrupt filtering characteristics are undesirably affected by incident angle, temperature, and polarization. To solve these problems, a 2Dmetal periodic grating structure, which does not depend on the polarization, was applied. The grating structure comprises an Au layer and an electron beam resist layer, and was fabricated by electron beam lithography. The optical characteristics of this structure in the visible light region were measured by a spectrometer, and the optical properties were related to structural parameters of the double-layer, 2D grating structure. In particular, the reflectance over the entire visible light spectrum decreased at periods of 800 nm and 1 μm. The wavelengths of minimum and maximum reflectance were shifted by changing the spacing between the upper and lower metal layers from 270 to 370 nm. Simulation results suggested that the interference between the upper and lower layers and the surface plasmon resonance between the metal and resist layers occur simultaneously. Therefore, in the visible light region, the reflectance and transmission spectra were controlled by altering the structure of the 2D metal periodic grating.
言語 en
書誌情報 Proceedings of SPIE

巻 9668, 発行日 2015-12-22
ISSN
収録物識別子タイプ PISSN
収録物識別子 0277-786X
DOI
関連タイプ isIdenticalTo
識別子タイプ DOI
関連識別子 10.1117/12.2201116
フォーマット
内容記述タイプ Other
内容記述 application/pdf
著者版フラグ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
資源タイプ(三重大)
値 Journal Article / 学術雑誌論文
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