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  1. 40 大学院工学研究科・工学部
  2. 40A 学術雑誌論文
  3. 学術雑誌論文

電気抵抗温度依存性の測定によるアルミニウム薄膜の音速評価

http://hdl.handle.net/10076/8799
http://hdl.handle.net/10076/8799
9910213a-4929-429b-a021-baa74ef36624
名前 / ファイル ライセンス アクション
40A6948.pdf 40A6948.pdf (416.0 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2008-04-30
タイトル
言語 ja
タイトル 電気抵抗温度依存性の測定によるアルミニウム薄膜の音速評価
言語
言語 jpn
キーワード
主題Scheme Other
主題 Relaxation Time
キーワード
主題Scheme Other
主題 Linear Response Theory
キーワード
主題Scheme Other
主題 Force-Force Correlation Function
キーワード
主題Scheme Other
主題 Pseudopotential Method
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者 孫, 新

× 孫, 新

WEKO 20919

ja 孫, 新

Search repository
小竹, 茂夫

× 小竹, 茂夫

WEKO 20920

ja 小竹, 茂夫

Search repository
鈴木, 泰之

× 鈴木, 泰之

WEKO 20921

ja 鈴木, 泰之

Search repository
妹尾, 允史

× 妹尾, 允史

WEKO 20922

ja 妹尾, 允史

Search repository
著者別名 SUN, Xin

× SUN, Xin

WEKO 20923

en SUN, Xin

Search repository
KOTAKE, Shigeo

× KOTAKE, Shigeo

WEKO 20924

en KOTAKE, Shigeo

Search repository
SUZUKI, Yasuyuki

× SUZUKI, Yasuyuki

WEKO 20925

en SUZUKI, Yasuyuki

Search repository
SENOO, Masafumi

× SENOO, Masafumi

WEKO 20926

en SENOO, Masafumi

Search repository
抄録
内容記述タイプ Abstract
内容記述 The evaluation of sound velocity, elastic constant of thin film has not been well established. The relation between electrical resistivity and sound velocity has been clarified from the calculation on the temperature dependence of electrical resistivity by well-known linear response theory. From the experimental data of electrical resistivity, we evaluated sound velocity and elastic constant of thin films by using the linear response theory, pseudopotential method. We also confirmed the method to evaluate the mechanical properties of thin film by measuring electrical resistivity.
書誌情報 日本機械学會論文集. A編

巻 64, 号 621, p. 1410-1414, 発行日 1998-05-25
ISSN
収録物識別子タイプ PISSN
収録物識別子 0387-5008
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AN0018742X
権利
権利情報 社団法人日本機械学会
権利
権利情報 本文データは学協会の許諾に基づきCiNiiから複製したものである
フォーマット
内容記述タイプ Other
内容記述 application/pdf
著者版フラグ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
日本十進分類法
主題Scheme NDC
主題 420
その他のタイトル
Evaluation of sound velocity of aluminum films by measurements of temperature dependence of electrical resistivities
出版者
出版者 日本機械学会
関係URI
関連名称 http://ci.nii.ac.jp/naid/110002374588/
資源タイプ(三重大)
Journal Article / 学術雑誌論文
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