| Item type |
学術雑誌論文 / Journal Article(1) |
| 公開日 |
2008-03-05 |
| タイトル |
|
|
タイトル |
Variation in Preferred Orientations of TiN Thin Films Prepared by Ion Beam Assisted Deposition |
|
言語 |
en |
| 言語 |
|
|
言語 |
eng |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Titanium nitride |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Preferred orientation |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Ion beam assisted deposition |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Transport ratio |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Incidence angle |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Thickness |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Temperature |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| 著者 |
MATSUMURO, Akihito
HAYASHI, Toshiyuki
MURAMATSU, Mutsuo
TAKAHASHI, Yutaka
KOHZAKI, Masao
YAMAGUCHI, Katsumi
|
| 抄録 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
The effects of various experimental conditions on the preferred orientations of titanium nitride (TiN) thin films were investigated. These films were formed on Si (100) wafers and sapphire (0001) substrates by ion beam assisted deposition (IBAD) with various N/Ti transport ratios, N ion incidence angles, film thicknesses and substrate temperatures. The acceleration voltage of the incident ions was 1 kV. The preferred orientation of the TiN films changed from (111) to (100) as the N/Ti transport ratios and ion incidence angles increased. This phenomenon is caused by the selective damage to crystal growth due to the energy of the bombarding particles. It was also found that an increase in film thickness changed the preferred orientation of the TiN (100) film to a (100) plus (110) orientation. Furthermore, this orientation reverted to (100) with the heating of the substrate during film preparation. It is concluded that these phenomena were caused by the process of minimizing the overall energy. Thus, the heating of the substrate was useful for synthesizing thick TiN (100) films in this preparation method. Transmission electron microscopy (TEM) observation of TiN (100) films suggested that these films had good crystallinity. |
| 書誌情報 |
Materials science research international
巻 7,
号 1,
p. 1-6,
発行日 2001-03-15
|
| ISSN |
|
|
収録物識別子タイプ |
PISSN |
|
収録物識別子 |
1341-1683 |
| 書誌レコードID |
|
|
収録物識別子タイプ |
NCID |
|
収録物識別子 |
AA11046472 |
| 権利 |
|
|
権利情報 |
社団法人日本材料学会 |
| 権利 |
|
|
権利情報 |
本文データは学協会の許諾に基づきCiNiiから複製したものである |
| フォーマット |
|
|
内容記述タイプ |
Other |
|
内容記述 |
application/pdf |
| 著者版フラグ |
|
|
出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| 日本十進分類法 |
|
|
主題Scheme |
NDC |
|
主題 |
570 |
| 出版者 |
|
|
出版者 |
Society of Materials Science |
| 関係URI |
|
|
|
関連名称 |
http://ci.nii.ac.jp/naid/110002283655/ |
| 資源タイプ（三重大） |
|
|
値 |
Journal Article / 学術雑誌論文 |
40A6637.pdf (580.3 kB)
